JPH0219959Y2 - - Google Patents
Info
- Publication number
- JPH0219959Y2 JPH0219959Y2 JP8391085U JP8391085U JPH0219959Y2 JP H0219959 Y2 JPH0219959 Y2 JP H0219959Y2 JP 8391085 U JP8391085 U JP 8391085U JP 8391085 U JP8391085 U JP 8391085U JP H0219959 Y2 JPH0219959 Y2 JP H0219959Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- diffusion
- wafer
- attached
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 27
- 238000009792 diffusion process Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8391085U JPH0219959Y2 (en]) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8391085U JPH0219959Y2 (en]) | 1985-06-05 | 1985-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61201340U JPS61201340U (en]) | 1986-12-17 |
| JPH0219959Y2 true JPH0219959Y2 (en]) | 1990-05-31 |
Family
ID=30632962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8391085U Expired JPH0219959Y2 (en]) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0219959Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0519951Y2 (en]) * | 1987-10-20 | 1993-05-25 |
-
1985
- 1985-06-05 JP JP8391085U patent/JPH0219959Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61201340U (en]) | 1986-12-17 |
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